16.05.2012 - SARA GALLIAN VISITED PROF. HITCHON AND PROF. KUSHNER
During the last week of April, Sara Gallian, research assistant at TET Institute working in the SFB-TR 87 framework, has visited Prof. Hitchon and Prof. Kushner to discuss on the simulation of the HPPMS process. Nick Hitchon is a Professor at the University of Wisconsin-Madison and an expert in the field of kinetic plasma simulations. He is cooperating with the TET group on the phenomenological modeling of the recently observed rotating instability during the HPPMS operation. Mark Kushner is a Professor at the University of Michigan and is head of the Computational Plasma Science and Engineering Group (CPSEG) in the Department of Electrical and Computer Engineering. Prof. Kushner is a well known expert in the field of Hybrid Modelling and the main developer of the Hybrid Plasma Equipment Model (HPEM). HPEM is a comprehensive modeling platform for low pressure plasma processing reactors, capable of addressing Magnetron sputter and Ionized Metal Physical Vapor Deposition (IMPVD). During the visit, it was discussed the possibility use HPEM in the preliminary simulation of the HPPMS discharge.
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