Plasma deposition
14.04.2014 - 72ND IUVSTA WORKSHOP
The 72nd IUVSTA Workshop “Plasma-assisted vapour deposition of oxide-based thin films and coatings” was held between April 6th and 11th, 2014 in Schloss Seggau (near Graz), Austria. This constituted a nice forum for scientific discussion about coating synthesis by plasma CVD, sputtering and vacuum arc deposition. Dr. Carles Corbella, from the Reactive Plasmas Group, presented the work “Upscaling plasma deposition: the influence of technological parameters” as a contributed talk.