ATOMIC LAYER DEPOSITION (ALD) WORKSHOP
Prof. Anjana Devi had an invited talk about "Tuning precursor characteristics for ALD applications" at the ALD Workshop at the IMEC conference, which took part November 28th-29th, 2011, in Leuven, Belgium. IMEC performs world-leading research in nano-electronics and nano-technology. Imec’s research is applied in better healthcare, smart electronics, sustainable energy, and safer transport. To promote collaboration and the exchange of knowledge within Europe, as well as to discuss about new trends and opportunities, imec organizes a workshop on the principles and use of ALD. The workshop is organized by Imec Belgium and Imec-NL. The workshop will take place at imec’s research facilities in Leuven, Belgium.