Research Department Plasmas with Complex Interactions

1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11

Faculty of Chemistry

PROF. DR. ANJANA DEVI, INORGANIC MATERIALS CHEMISTRY, FACULTY OF CHEMIS-TRY AND BIOCHEMISTRY

The research concept is based on bridging molecular chemistry and materials science to modulate materials prop-erties for functional devices. Current investigations focus on materials processing and tuning materials properties that are necessary to make new inroads into future technological developments. Large area fabrication of func-tional materials such as metals, oxides, sulfides, carbides and nitrides are targeted. The expertise lies in develop-ing novel precursors that are ultimately transformed into nanostructured thin films via chemical vapor deposition (CVD) and atomic layer deposition (ALD) processing. Plasma enhanced ALD is used as a powerful tool to fabricate gas sensors, passivation layers on electronic components, gas barrier layers on polymers, membranes for gas sepa-ration, 2D materials for electronics, gas sensors, energy storage etc. 

Keywords: Plasma assisted atomic layer deposition, materials chemistry, 2D-Materials 

Webpage: Bioinorganic Chemistry